Invention Application
- Patent Title: METHOD OF FORMING MAGNETIC PATTERNS, AND METHOD OF MANUFACTURING MAGNETIC MEMORY DEVICES
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Application No.: US15259198Application Date: 2016-09-08
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Publication No.: US20170148979A1Publication Date: 2017-05-25
- Inventor: Ho-Young KIM , Jin-Hye BAE , Hoon HAN , Won-Jun LEE , Chang-Kyu LEE , Geun-Joo BAEK , Jung-Ig JEON
- Applicant: Ho-Young KIM , Jin-Hye BAE , Hoon HAN , Won-Jun LEE , Chang-Kyu LEE , Geun-Joo BAEK , Jung-Ig JEON
- Applicant Address: KR Cheonan-si
- Assignee: SAMYOUNG PURE CHEMICALS CO., LTD.
- Current Assignee: SAMYOUNG PURE CHEMICALS CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2015-0165120 20151125
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L27/22 ; G11C11/16 ; H01L43/10 ; H01L43/12 ; H01L43/02
Abstract:
A composition for cleaning a magnetic pattern, a method of manufacturing a magnetic memory device, a method of forming a magnetic pattern, and a magnetic memory device, the composition including a glycol ether-based organic solvent; a decomposing agent that includes an aliphatic amine; and at least one of a chelating agent, or a cleaning accelerator that includes an organic alkaline compound, wherein the composition is devoid of water.
Public/Granted literature
- US10062837B2 Method of forming magnetic patterns, and method of manufacturing magnetic memory devices Public/Granted day:2018-08-28
Information query
IPC分类:
