An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.