公开(公告)号：US20210190813A1

公开(公告)日：2021-06-24

申请号：US16876777

申请日：2020-05-18

Applicant: INVENSENSE, INC.

Inventor： Michele Folz ,  Giacomo Laghi

IPC: G01P15/08 ,  G01P15/125

Abstract: A MEMS accelerometer includes at least one proof mass and two or more drive electrodes associated with each proof mass. Self-test signals are applied to the drive electrodes. The self-test signals have a signal pattern that includes different duty cycles being applied to the drive electrodes simultaneously, which in turn imparts an electrostatic force on the proof mass. The response of the proof mass to the electrostatic force is measured to determine a sensitivity of the MEMS accelerometer.

公开(公告)号：US10725068B2

公开(公告)日：2020-07-28

申请号：US15363522

申请日：2016-11-29

Applicant: InvenSense, Inc.

Inventor： Giacomo Gafforelli ,  Luca Coronato ,  Adolfo Giambastiani ,  Federico Mazzarella ,  Massimiliano Musazzi ,  Michele Folz

IPC: G01P21/00 ,  G01P15/125

Abstract: A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have different frequencies. An error is identified based on a portion of a signal that is received from the accelerometer and that is responsive to the auxiliary drive signal. Compensation is performed at the accelerometer based on the identified error.

公开(公告)号：US20220412813A1

公开(公告)日：2022-12-29

申请号：US17359866

申请日：2021-06-28

Applicant: INVENSENSE, INC.

Inventor： Daniele Gardino ,  Michele Folz ,  Antonio Aprile ,  Piero Malcovati ,  Raffaele Boi ,  Edoardo Bonizzoni

IPC: G01K7/01

Abstract: The described technology is generally directed towards an electrical current based temperature sensor and temperature information digitizer, referred to herein as a “temperature digitizer”. The temperature digitizer can include a sensor core, a digital to analog converter, a current comparator, and a processor. The processor can be configured to perform multiple current comparisons using the sensor core, digital to analog converter, and current comparator, and the processor can generate a digital code that reflects the results of the multiple current comparisons. The digital code represents the temperature.

公开(公告)号：US20170168088A1

公开(公告)日：2017-06-15

申请号：US15370385

申请日：2016-12-06

Applicant: InvenSense, Inc.

Inventor： Luca Coronato ,  Giacomo Gafforelli ,  Adolfo Giambastiani ,  Federico Mazzarella ,  Massimiliano Musazzi ,  Michele Folz

IPC: G01P21/00 ,  G01P15/125

CPC classification number: G01P21/00 ,  G01P15/125

Abstract: An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.

公开(公告)号：US11268975B2

公开(公告)日：2022-03-08

申请号：US16876777

申请日：2020-05-18

Applicant: INVENSENSE, INC.

Inventor： Michele Folz ,  Giacomo Laghi

IPC: G01P15/08 ,  G01P15/125

Abstract: A MEMS accelerometer includes at least one proof mass and two or more drive electrodes associated with each proof mass. Self-test signals are applied to the drive electrodes. The self-test signals have a signal pattern that includes different duty cycles being applied to the drive electrodes simultaneously, which in turn imparts an electrostatic force on the proof mass. The response of the proof mass to the electrostatic force is measured to determine a sensitivity of the MEMS accelerometer.