中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

32 records (took 0.031 seconds)

    Out-of-plane sensing gyroscope robust to external acceleration and rotation
    1.
    发明授权
    Out-of-plane sensing gyroscope robust to external acceleration and rotation 有权

    公开(公告)号：US10466053B2

    公开(公告)日：2019-11-05

    申请号：US15479079

    申请日：2017-04-04

    Applicant: InvenSense, Inc.

    Inventor： Jaakko Ruohio ,  Luca Coronato ,  Giacomo Gafforelli

    IPC: G01C19/5747

    Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

    DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVITY SELF-CALIBRATION
    2.
    发明申请
    DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVITY SELF-CALIBRATION 有权

    公开(公告)号：US20240425354A1

    公开(公告)日：2024-12-26

    申请号：US18214195

    申请日：2023-06-26

    Applicant: InvenSense, Inc.

    Inventor： Roberto Martini ,  Luca Coronato ,  Matthew Julian Thompson

    IPC: B81B3/00 ,  G01P15/08 ,  G01P21/00

    Abstract: A microelectromechanical system (MEMS) accelerometer incorporates deformation sensing with a plurality of sense electrodes positioned to facilitate determining a deformation pattern (e.g., asymmetric or symmetric) of an underlying substrate layer relative to a MEMS layer. The deformation pattern of the substrate layer contributes to offset and/or sensitivity of the accelerometer, so the determination of the deformation pattern enables processing circuitry to compensate and improve offset and/or sensitivity stability. Tilt sense electrodes and/or comparison electrodes may be incorporated alongside the plurality of sense electrodes to monitor deformation of the substrate layer relative to a fixed portion of the MEMS layer.

    MEMS sensor with compensation of residual voltage
    3.
    发明授权
    MEMS sensor with compensation of residual voltage 有权

    公开(公告)号：US12174215B2

    公开(公告)日：2024-12-24

    申请号：US17102116

    申请日：2020-11-23

    Applicant: INVENSENSE, INC.

    Inventor： Giacomo Gafforelli ,  Luca Coronato ,  Adolfo Giambastiani

    IPC: G01P21/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125

    Abstract: A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.

    CAPACITANCE GAP MEASUREMENT
    6.
    发明申请
    CAPACITANCE GAP MEASUREMENT 有权

    公开(公告)号：US20220234883A1

    公开(公告)日：2022-07-28

    申请号：US17559435

    申请日：2021-12-22

    Applicant: InvenSense, Inc.

    Inventor： Edoardo Belloni ,  Luca Coronato ,  Giacomo Gafforelli

    IPC: B81B3/00

    Abstract: A microelectromechanical system (MEMS) test structure includes a plurality of capacitors formed from sense electrodes and capacitive plates having a predetermined geometry and size associated with a related MEMS device such as a MEMS sensor. Based on the predetermined relationships between the capacitors of the test structure, and between the test structure and the MEMS devices, an effect of fringing fields on the sensed capacitances of the MEMS devices may be eliminated, and the capacitive gap of the MEMS device may be accurately measured.

    MEMS structure for offset minimization of out-of-plane sensing accelerometers
    7.
    发明授权
    MEMS structure for offset minimization of out-of-plane sensing accelerometers 有权

    公开(公告)号：US11231441B2

    公开(公告)日：2022-01-25

    申请号：US16842619

    申请日：2020-04-07

    Applicant: INVENSENSE, INC.

    Inventor： Giacomo Laghi ,  Matthew Julian Thompson ,  Luca Coronato ,  Roberto Martini

    IPC: G01P15/125 ,  B81B7/00 ,  G01P15/08

    Abstract: Exemplary embodiment of a tilting z-axis, out-of-plane sensing MEMS accelerometers and associated structures and configurations are described. Disclosed embodiments facilitate improved offset stabilization. Non-limiting embodiments provide exemplary MEMS structures and apparatuses characterized by one or more of having a sensing MEMS structure that is symmetric about the axis orthogonal to the springs or flexible coupling axis, a spring or flexible coupling axis that is aligned to one of the symmetry axes of the electrodes pattern, a different number of reference electrodes and sense electrodes, a reference MEMS structure having at least two symmetry axes, one which is along the axis of the springs or flexible coupling, and/or a reference structure below the spring or flexible coupling axis.

    Mems sensor with compensation of residual voltage
    8.
    发明申请
    Mems sensor with compensation of residual voltage 有权

    公开(公告)号：US20210102970A1

    公开(公告)日：2021-04-08

    申请号：US17102116

    申请日：2020-11-23

    Applicant: INVENSENSE, INC.

    Inventor： Giacomo Gafforelli ,  Luca Coronato ,  Adolfo Giambastiani

    IPC: G01P21/00 ,  B81C1/00 ,  G01P15/125

    Abstract: A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.

    Yaw rate gyroscope robust to linear and angular acceleration
    9.
    发明授权
    Yaw rate gyroscope robust to linear and angular acceleration 有权

    公开(公告)号：US10704908B1

    公开(公告)日：2020-07-07

    申请号：US16423697

    申请日：2019-05-28

    Applicant: INVENSENSE, INC.

    Inventor： Luca Coronato ,  Giacomo Gafforelli ,  Jaakko Ruohio

    IPC: G01C19/5726

    Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Patent Agency Ranking