- 专利标题: MANUFACTURING FLEXIBLE ORGANIC ELECTRONIC DEVICES
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申请号: US15459044申请日: 2017-03-15
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公开(公告)号: US20170187006A1公开(公告)日: 2017-06-29
- 发明人: Ruiqing Ma , Jeff Silvernail , Prashant Mandlik , Julia J. Brown , John Felts
- 申请人: UNIVERSAL DISPLAY CORPORATION
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; H01L51/52 ; H01L51/00
摘要:
A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.
公开/授权文献
- US10862074B2 Manufacturing flexible organic electronic devices 公开/授权日:2020-12-08
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