Invention Application
- Patent Title: TRENCH METAL INSULATOR METAL CAPACITOR WITH OXYGEN GETTERING LAYER
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Application No.: US15595503Application Date: 2017-05-15
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Publication No.: US20170250073A1Publication Date: 2017-08-31
- Inventor: Takashi Ando , Eduard A. Cartier , Michael P. Chudzik , Aritra Dasgupta , Herbert L. Ho , Donghun Kang , Rishikesh Krishnan , Vijay Narayanan , Kern Rim
- Applicant: International Business Machines Corporation
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/20 ; H01G4/005 ; H01L21/322
Abstract:
A method including forming an oxygen gettering layer on one side of an insulating layer of a deep trench capacitor between the insulating layer and a substrate, the oxygen gettering layer including an aluminum containing compound, and depositing an inner electrode on top of the insulating layer, the inner electrode including a metal.
Public/Granted literature
- US09911597B2 Trench metal insulator metal capacitor with oxygen gettering layer Public/Granted day:2018-03-06
Information query
IPC分类:
