Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
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Application No.: US15054142Application Date: 2016-02-26
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Publication No.: US20170250089A1Publication Date: 2017-08-31
- Inventor: Ting-Huang Kuo , Chia-Pin Lo , Wei-Barn Chen , Chen-Chieh Chiang , Chii-Ming Wu , Chi-Cherng Jeng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L21/3115
- IPC: H01L21/3115 ; H01L27/092 ; H01L21/32 ; H01L21/02 ; H01L21/8238 ; H01L21/3105

Abstract:
Semiconductor devices and manufacturing method of the same are disclosed. A semiconductor device includes a substrate, a p-type MOS transistor, an n-type MOS transistor and a cured flowable oxide layer. The substrate includes a first region and a second region. The p-type MOS transistor is in the first region. The n-type MOS transistor is in the second region. The cured flowable oxide layer covers the p-type MOS transistor and the n-type MOS transistor, wherein a first strain of the cured flowable oxide layer applying to the p-type MOS transistor is different from a second strain of the cured flowable oxide layer applying to the n-type MOS transistor, and the difference therebetween is greater than 0.002 Gpa.
Public/Granted literature
- US09859129B2 Semiconductor device and manufacturing method of the same Public/Granted day:2018-01-02
Information query
IPC分类: