Invention Application
- Patent Title: APPARATUS AND METHOD FOR PRODUCING GALLIUM OXIDE CRYSTAL
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Application No.: US15470547Application Date: 2017-03-27
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Publication No.: US20170306521A1Publication Date: 2017-10-26
- Inventor: Keigo HOSHIKAWA , Takumi KOBAYASHI , Etsuko OHBA , Jun YANAGISAWA
- Applicant: SHINSHU UNIVERSITY , Fujikoshi Machinery Corp.
- Priority: JP2016-085153 20160421
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B29/16 ; H01L21/02

Abstract:
The apparatus for producing a gallium oxide crystal relating to the invention contains a vertical Bridgman furnace containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a crucible shaft provided vertically movably through the base body; and a crucible disposed on the crucible shaft, heated with the heater, the crucible is a crucible containing a Pt-based alloy, the furnace body has an inner wall that is formed as a heat-resistant wall containing plural ring shaped heat-resistant members each having a prescribed height accumulated on each other, and the ring shaped heat-resistant members each contain plural divided pieces that are joined to each other to the ring shape.
Public/Granted literature
- US10570528B2 Apparatus and method for producing gallium oxide crystal Public/Granted day:2020-02-25
Information query
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