Invention Application
- Patent Title: MULTICOLUMN CHARGED PARTICLE BEAM EXPOSURE APPARATUS
-
Application No.: US15461829Application Date: 2017-03-17
-
Publication No.: US20170323760A1Publication Date: 2017-11-09
- Inventor: Masaki Kurokawa , Takamasa Sato , Shinichi Kojima , Akio Yamada
- Applicant: ADVANTEST CORPORATION
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Priority: JP2016-093801 20160509
- Main IPC: H01J37/147
- IPC: H01J37/147 ; H01J37/317

Abstract:
A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.
Public/Granted literature
- US10083813B2 Multicolumn charged particle beam exposure apparatus Public/Granted day:2018-09-25
Information query