Invention Application
- Patent Title: ION SOURCES AND METHODS FOR GENERATING ION BEAMS WITH CONTROLLABLE ION CURRENT DENSITY DISTRIBUTIONS OVER LARGE TREATMENT AREAS
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Application No.: US15170570Application Date: 2016-06-01
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Publication No.: US20170352521A1Publication Date: 2017-12-07
- Inventor: Boris Druz , Rustam Yevtukhov , Robert Hieronymi , Alan V. Hayes , Mathew Levoso , Peter Porshnev
- Applicant: Veeco Instruments Inc.
- Main IPC: H01J37/305
- IPC: H01J37/305 ; H01J37/08
Abstract:
The presently disclosed ion sources include one or more electromagnets for changing the distribution of plasma within a discharge space of an ion source. At least one of the electromagnets is oriented about an outer periphery of a tubular sidewall of the ion source and changes a distribution of the plasma in a peripheral region of the discharge space.
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