Invention Application
- Patent Title: SYSTEMS AND METHODS FOR ELECTRICALLY TESTING ELECTROMIGRATION IN AN ELECTROMIGRATION TEST STRUCTURE
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Application No.: US15181909Application Date: 2016-06-14
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Publication No.: US20170356957A1Publication Date: 2017-12-14
- Inventor: Timothy Allen McMullen , Brent Dale Harry , Eric James Wilcox , James J. Donlin
- Applicant: Cascade Microtech, Inc.
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.
Public/Granted literature
- US10161994B2 Systems and methods for electrically testing electromigration in an electromigration test structure Public/Granted day:2018-12-25
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