Invention Application
- Patent Title: TARGET IMAGE-CAPTURE DEVICE, EXTREME-ULTRAVIOLET-LIGHT GENERATION DEVICE, AND EXTREME-ULTRAVIOLET-LIGHT GENERATION SYSTEM
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Application No.: US15671691Application Date: 2017-08-08
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Publication No.: US20170358442A1Publication Date: 2017-12-14
- Inventor: Hirokazu HOSODA , Takayuki YABU , Hideo HOSHINO
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Priority: JPPCT/JP2015/057502 20150313
- Main IPC: H01L21/027
- IPC: H01L21/027 ; H05G2/00

Abstract:
A target image-capture device may be configured to capture an image of a target that is made into plasma when irradiated with laser light and generates extreme-ultraviolet-light. The target image-capture device may include a droplet detector configured to detect passage of a droplet output as the target, and output a detection signal, an illumination light source, an image capturing element, a shutter device, and a controller configured to output, to the image capturing element, an exposure signal allowing the image capturing element to perform image capturing, and output, to the shutter device, a shutter open/close signal allowing a shutter to perform an open and close operation upon input of the detection signal. The controller may output the shutter open/close signal to the shutter device to make the shutter closed during when the droplet is irradiated with the laser light so that the plasma is generated.
Public/Granted literature
Information query
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