公开(公告)号：US20170358442A1

公开(公告)日：2017-12-14

申请号：US15671691

申请日：2017-08-08

Applicant: Gigaphoton Inc.

Inventor： Hirokazu HOSODA ,  Takayuki YABU ,  Hideo HOSHINO

IPC: H01L21/027 ,  H05G2/00

CPC classification number: H01L21/027 ,  G03F7/70558 ,  H05G2/00 ,  H05G2/006 ,  H05G2/008

Abstract: A target image-capture device may be configured to capture an image of a target that is made into plasma when irradiated with laser light and generates extreme-ultraviolet-light. The target image-capture device may include a droplet detector configured to detect passage of a droplet output as the target, and output a detection signal, an illumination light source, an image capturing element, a shutter device, and a controller configured to output, to the image capturing element, an exposure signal allowing the image capturing element to perform image capturing, and output, to the shutter device, a shutter open/close signal allowing a shutter to perform an open and close operation upon input of the detection signal. The controller may output the shutter open/close signal to the shutter device to make the shutter closed during when the droplet is irradiated with the laser light so that the plasma is generated.

公开(公告)号：US20160365694A1

公开(公告)日：2016-12-15

申请号：US14455719

申请日：2014-08-08

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Hideo HOSHINO

IPC: H01S3/02 ,  G03F7/20 ,  F16B7/18 ,  F16B41/00 ,  H05G2/00 ,  F16B5/02

CPC classification number: H01S3/02 ,  F16B5/02 ,  F16B7/18 ,  F16B41/002 ,  G03F7/70008 ,  G03F7/70025 ,  G03F7/70833 ,  G03F7/70975 ,  H01S3/2316 ,  H05G2/005 ,  H05G2/008

Abstract: A laser apparatus may include, a first frame and a second frame, a sleeve through-hole provided in the second frame, a sleeve insertion hole provided in the first frame, a bolt, a positioning sleeve that is formed in an approximately cylindrical shape into which the bolt can be inserted and that positions the first frame and the second frame by passing through the sleeve through-hole and being inserted into the sleeve insertion hole, a nut that is provided in the first frame and into which the bolt is screwed, and a fall prevention unit that is provided in the second frame and that prevents the bolt and the positioning sleeve from falling.

Abstract translation: 激光装置可以包括第一框架和第二框架，设置在第二框架中的套筒通孔，设置在第一框架中的套筒插入孔，螺栓，形成为大致圆筒形的定位套筒 螺栓可以插入，并且通过穿过套筒通孔定位第一框架和第二框架并插入到套筒插入孔中，设置在第一框架中并且螺栓被拧入的螺母， 以及设置在第二框架中并防止螺栓和定位套筒掉落的防跌落单元。

公开(公告)号：US20220009031A1

公开(公告)日：2022-01-13

申请号：US17487348

申请日：2021-09-28

Applicant: Gigaphoton Inc.

Inventor： Satoshi TANAKA ,  Akiyoshi SUZUKI ,  Hideo HOSHINO

IPC: B23K26/082 ,  B23K26/0622

Abstract: Provided is a laser annealing apparatus causing laser light to be radiated to processing receiving areas arranged, out of a first direction and a second direction perpendicular to the first direction, along at least the second direction and move a batch radiation area and a workpiece in the first direction, and the laser annealing apparatus includes an energy density measuring apparatus measuring the energy density at, out of first and second ends of the batch radiation area in the second direction, at least the second end, an energy density adjusting apparatus adjusting the energy density at the first end, and a controller controlling the energy density adjusting apparatus. The energy density at the first end when (N+1)-th scanning is performed is so adjusted that the energy density at the first end in an (N+1)-th scan area approaches the energy density at the second end in the N-th scan area.

公开(公告)号：US20140374605A1

公开(公告)日：2014-12-25

申请号：US14485355

申请日：2014-09-12

Applicant: GIGAPHOTON INC.

Inventor： Hakaru MIZOGUCHI ,  Takashi SUGANUMA ,  Hideo HOSHINO ,  Osamu WAKABAYASHI

IPC: H01S3/00 ,  H01S3/13

CPC classification number: H01S3/0071 ,  H01S3/0014 ,  H01S3/10061 ,  H01S3/1305 ,  H05G2/008

Abstract: An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.

Abstract translation: 光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

公开(公告)号：US20130148677A1

公开(公告)日：2013-06-13

申请号：US13759970

申请日：2013-02-05

Applicant: Gigaphoton Inc.

Inventor： Masato MORIYA ,  Hideo HOSHINO ,  Osamu WAKABAYASHI ,  Hakaru MIZOGUCHI

IPC: H01S3/10

CPC classification number: H01S3/10 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/034 ,  H01S3/1061 ,  H01S3/1307 ,  H01S3/136 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.

Abstract translation: EUV光源装置适当地补偿由热量改变的激光束的波前。 在放大激光束的放大系统中提供波前补偿器和传感器。 传感器检测并输出激光束的角度（方向）和其波前的曲率的变化。 波前补偿控制器根据传感器的测量结果向波前补偿器输出信号。 波前补偿器根据波前补偿控制器的指令将激光束的波前校正到预定的波前。

公开(公告)号：US20170317464A1

公开(公告)日：2017-11-02

申请号：US15651253

申请日：2017-07-17

Applicant: GIGAPHOTON INC.

Inventor： Yoshiaki KUROSAWA ,  Hideo HOSHINO

IPC: H01S3/10 ,  H01S3/034 ,  H01S3/00 ,  H01S3/08 ,  H01S3/095 ,  H01S3/23

CPC classification number: H01S3/10007 ,  H01S3/0064 ,  H01S3/0071 ,  H01S3/034 ,  H01S3/08072 ,  H01S3/095 ,  H01S3/09702 ,  H01S3/1003 ,  H01S3/10069 ,  H01S3/2308 ,  H01S3/2316 ,  H01S2301/02 ,  H05G2/008

Abstract: A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

公开(公告)号：US20130221246A1

公开(公告)日：2013-08-29

申请号：US13679930

申请日：2012-11-16

Applicant: GIGAPHOTON INC.

Inventor： Tsukasa HORI ,  Hideo HOSHINO ,  Tatsuya YANAGIDA

IPC: G21K5/02

CPC classification number: G21K5/02 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device is provided that may include a pair of rails arranged to face each other, the rails having electrically conductive properties, a target transport mechanism configured to supply a target material into a space between the rails and in contact with the rails, and a power supply connected to the rails and configured to supply a current to the target material through the rails. Methods and systems using the target supply device are also provided.

Abstract translation: 提供目标供应装置，其可以包括一对导轨，其布置成彼此面对，所述导轨具有导电性质;目标传送机构，其配置成将目标材料供应到轨道之间的空间中并与导轨接触;以及 连接到轨道并被配置为通过轨道向目标材料提供电流的电源。 还提供了使用目标供应装置的方法和系统。

公开(公告)号：US20160227637A1

公开(公告)日：2016-08-04

申请号：US14992477

申请日：2014-06-13

Applicant: GIGAPHOTON INC.

Inventor： Tomohide ICHINOSE ,  Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Hideo HOSHINO

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  B01D25/16 ,  B01D29/46 ,  B01D46/406 ,  G03F7/70191 ,  H05G2/005

Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.

Abstract translation: 过滤器可以包括：具有设置有通道的第一表面的第一构件; 以及第二构件，其具有覆盖所述通道的第二表面。 第一构件可以包括第一可通过部分，其允许流体在通道的第一区域之间在第一表面和限定在与第一表面相对的第一构件的表面旁边的第一空间之间通过。 第二构件可以包括第二可通过部分，其允许流体在第二表面和第二空间之间通过，第二空间限定在与第二表面相对的第二构件的表面旁边，通过与第二空间相距的通道的第二区域 第一区。

公开(公告)号：US20160172820A1

公开(公告)日：2016-06-16

申请号：US15040588

申请日：2016-02-10

Applicant: GIGAPHOTON INC.

Inventor： Takashi SUGANUMA ,  Hideo HOSHINO

IPC: H01S3/23 ,  H05G2/00 ,  H01S3/08 ,  H01S3/081

CPC classification number: H01S3/2316 ,  G03F7/70033 ,  H01S3/0078 ,  H01S3/08059 ,  H01S3/08095 ,  H01S3/081 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2325 ,  H01S3/2375 ,  H01S5/3402 ,  H01S2301/02 ,  H05G2/008

Abstract: There may be provided a laser amplifier including: a chamber containing a laser medium; a first window provided on the chamber, and configured to allow a laser light beam inputted from outside of the chamber to enter the chamber; an excitation unit configured to amplify, by exciting the laser medium, the laser light beam that has entered the chamber; a second window provided on the chamber, and configured to allow the laser light beam that has been amplified by the excitation unit to exit from the chamber to the outside; a mirror provided on a laser light path between the first window and the second window; and a wavelength selection film provided on one or more of the first window, the second window, and the mirror, and configured to suppress propagation of light beams of one or more suppression target wavelengths different from a desired wavelength.

Abstract translation: 可以提供一种激光放大器，包括：包含激光介质的腔室; 设置在所述室上的第一窗口，并且被配置为允许从所述室的外部输入的激光束进入所述室; 激励单元，被配置为通过激励激光介质来放大已经进入所述腔室的激光束; 设置在所述室上的第二窗口，并且被配置为允许被所述激励单元放大的激光束从所述室排出到外部; 设置在第一窗口和第二窗口之间的激光路径上的反射镜; 以及设置在第一窗口，第二窗口和反射镜的一个或多个上的波长选择膜，并且被配置为抑制不同于期望波长的一个或多个抑制目标波长的光束的传播。

公开(公告)号：US20170127505A1

公开(公告)日：2017-05-04

申请号：US15400116

申请日：2017-01-06

Applicant: Institute for Laser Technology ,  Gigaphoton Inc.

Inventor： Atsushi SUNAHARA ,  Georg SOUMAGNE ,  Yoshifumi UENO ,  Hideo HOSHINO

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/005 ,  H05G2/006

Abstract: An extreme ultraviolet light generation system may comprise a chamber, a target supply unit configured to supply, to a predetermined region in the chamber, a target having an atomic density of 8.0×1017 atoms/cm3 or higher and 1.3×1018 atoms/cm3 or lower, and a laser apparatus configured to irradiate the predetermined region with a pulse laser beam having an energy density of 10.5 J/cm2 or higher and 52.3 J/cm2 or lower in the predetermined region.