- 专利标题: SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
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申请号: US15626857申请日: 2017-06-19
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公开(公告)号: US20170368663A1公开(公告)日: 2017-12-28
- 发明人: Yen-Chu Yang , Stephen Jew , Jianshe Tang , Haosheng Wu , Shou-Sung Chang , Paul D. Butterfield , Alexander John Fisher , Bum Jick Kim
- 申请人: Yen-Chu Yang , Stephen Jew , Jianshe Tang , Haosheng Wu , Shou-Sung Chang , Paul D. Butterfield , Alexander John Fisher , Bum Jick Kim
- 主分类号: B24B57/02
- IPC分类号: B24B57/02 ; B24B37/10 ; H01L21/67
摘要:
An apparatus for chemical mechanical polishing includes a rotatable platen having a surface to support a polishing pad, a carrier head to hold a substrate in contact with the polishing pad, and a polishing liquid distribution system. The polishing liquid distribution system includes a dispenser positioned to deliver a polishing liquid to a portion of a polishing surface of the polishing pad, and a first barrier positioned before the portion of the polishing surface and configured to block used polishing liquid from reaching the portion of the polishing surface.
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