- 专利标题: High-Precision Dispense System With Meniscus Control
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申请号: US15675385申请日: 2017-08-11
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公开(公告)号: US20180047563A1公开(公告)日: 2018-02-15
- 发明人: Anton J. deVilliers , Rodney L. Robison , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, JR. , David Hetzer , Lior Huli , Joshua S. Hooge
- 申请人: Tokyo Electron Limited
- 主分类号: H01L21/027
- IPC分类号: H01L21/027 ; H01L21/02 ; H01L21/66 ; H01L21/67
摘要:
Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.
公开/授权文献
- US10354872B2 High-precision dispense system with meniscus control 公开/授权日:2019-07-16
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