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公开(公告)号：US20180047562A1
公开(公告)日：2018-02-15
申请号：US15675383
申请日：2017-08-11
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Rodney L. Robison , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, JR. , Lior Huli , Joshua S. Hooge
IPC: H01L21/027 , H01L21/02 , H01L21/67
CPC classification number: H01L21/0275 , B05B15/557 , B05C5/02 , B05C11/1007 , B05C11/1047 , H01L21/02118 , H01L21/67017 , H01L21/67023 , H01L21/6715
Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A process fluid filter is located downstream from a process fluid source as well as a system valve. Downstream from the process fluid filter there are no valves. Dispense actions can be initiated and stop while the system valve is open by using the elongate bladder. The elongate bladder can be expanded to stop or pause a dispense action, and then be contracted to assist with a dispense action.
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公开(公告)号：US20180047563A1
公开(公告)日：2018-02-15
申请号：US15675385
申请日：2017-08-11
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Rodney L. Robison , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, JR. , David Hetzer , Lior Huli , Joshua S. Hooge
IPC: H01L21/027 , H01L21/02 , H01L21/66 , H01L21/67
CPC classification number: H01L21/0275 , B05C5/02 , B05C11/1007 , B05C11/1047 , H01L21/02118 , H01L21/67017 , H01L21/67023 , H01L21/6715 , H01L21/67253 , H01L22/12
Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.
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公开(公告)号：US09718082B2
公开(公告)日：2017-08-01
申请号：US14600821
申请日：2015-01-20
Applicant: Tokyo Electron Limited
Inventor： Anton deVilliers , Ronald Nasman , James Grootegoed , Norman A. Jacobson, Jr.
CPC classification number: B05C5/0225 , B05C5/0204 , B05C9/10 , B05C11/1013 , H01L21/67017 , H01L21/67051 , Y10T137/7787
Abstract: A fluid dispensing apparatus is disclosed. Systems include an in-line or linear bladder apparatus configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. During a dispense-off period process fluid can collect in this bladder after the process fluid is pushed through a fine filter (micro filter). A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation.
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公开(公告)号：US11383211B2
公开(公告)日：2022-07-12
申请号：US16560481
申请日：2019-09-04
Applicant: Tokyo Electron Limited
Inventor： Ronald W. Nasman , Lior Huli , Anton deVilliers , Rodney Robison , Norman Jacobson , James Grootegoed
Abstract: A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.
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公开(公告)号：US10712663B2
公开(公告)日：2020-07-14
申请号：US15675376
申请日：2017-08-11
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, Jr.
Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A modular hydraulic unit houses the elongate bladder and hydraulic fluid in contact with an exterior surface of the bladder. When pressurized process fluid is in the elongate bladder, hydraulic controls can selectively reduce pressure on the bladder to cause expansion, and then selectively increase hydraulic pressure to assist with a dispense action.
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Patent Agency Ranking
公开(公告)号：US10354872B2
公开(公告)日：2019-07-16
申请号：US15675385
申请日：2017-08-11
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Rodney L. Robison , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, Jr. , David Hetzer , Lior Huli , Joshua S. Hooge
Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.
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公开(公告)号：US20150209818A1
公开(公告)日：2015-07-30
申请号：US14600821
申请日：2015-01-20
Applicant: Tokyo Electron Limited
Inventor： Anton deVilliers , Ronald Nasman , James Grootegoed , Norman A. Jacobson, JR.
CPC classification number: B05C5/0225 , B05C5/0204 , B05C9/10 , B05C11/1013 , H01L21/67017 , H01L21/67051 , Y10T137/7787
Abstract: A fluid dispensing apparatus is disclosed. Systems include an in-line or linear bladder apparatus configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. During a dispense-off period process fluid can collect in this bladder after the process fluid is pushed through a fine filter (micro filter). A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation.
Abstract translation: 公开了一种流体分配装置。 系统包括配置成膨胀以收集流体的液体并且收缩以帮助流体输送和分配的在线或线性膀胱装置。 在分配期间，过程流体被推动通过精细过滤器（微过滤器）之后，流体可以在该气囊中收集。 给定的过滤速率可以小于分配速率，并且因此本文系统补偿通常伴随流体过滤以进行微细加工的过滤器滞后，同时提供降低创建缺陷机会的大致线性配置。
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公开(公告)号：US20200338510A1
公开(公告)日：2020-10-29
申请号：US16560481
申请日：2019-09-04
Applicant: Tokyo Electron Limited
Inventor： Ronald W. NASMAN , Lior Huli , Anton DeVilliers , Rodney Robison , Norman Jacobson , James Grootegoed
Abstract: A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.
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公开(公告)号：US10403501B2
公开(公告)日：2019-09-03
申请号：US15675383
申请日：2017-08-11
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Rodney L. Robison , Ronald Nasman , David Travis , James Grootegoed , Norman A. Jacobson, Jr. , Lior Huli , Joshua S. Hooge
Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A process fluid filter is located downstream from a process fluid source as well as a system valve. Downstream from the process fluid filter there are no valves. Dispense actions can be initiated and stop while the system valve is open by using the elongate bladder. The elongate bladder can be expanded to stop or pause a dispense action, and then be contracted to assist with a dispense action.
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公开(公告)号：US09987655B2
公开(公告)日：2018-06-05
申请号：US15188394
申请日：2016-06-21
Applicant: Tokyo Electron Limited
Inventor： Anton J. deVilliers , Ronald Nasman , James Grootegoed , Norman A. Jacobson, Jr.
IPC: B05C11/00 , B05C9/00 , B05C11/10 , F04B13/00 , F04B43/00 , G03F7/16 , F04B13/02 , F04B43/08 , F04B43/107 , G03F7/30 , H01L27/00 , H01L27/11582 , H01L21/67 , F04B7/00
CPC classification number: B05C11/1002 , B05C9/00 , F04B7/00 , F04B13/00 , F04B13/02 , F04B43/00 , F04B43/0072 , F04B43/0081 , F04B43/086 , F04B43/107 , G03F7/16 , G03F7/30 , H01L21/67017 , H01L27/00 , H01L27/11582 , H01L28/00
Abstract: A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid common to exterior surfaces of each bladder in the bladder array. Simultaneously, some bladders within the array of linear bladders can be dispensing fluid or maintaining fluid while some bladders are collecting fluid. A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation. With multiple bladders, multiple different types of fluid can be readied for selective dispense.
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