- 专利标题： BULK ACOUSTIC FILTER DEVICE AND METHOD OF MANUFACTURING THE SAME
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申请号： US15487620申请日： 2017-04-14
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公开(公告)号： US20180048281A1公开(公告)日： 2018-02-15
- 发明人: Moon Chul LEE , Jae Chang LEE , Chang Hyun LIM , Tae Hun LEE , Tae Kyung LEE , Tae Yoon KIM
- 申请人： Samsung Electro-Mechanics Co., Ltd.
- 申请人地址： KR Suwon-si
- 专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2016-0102565 20160811
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H01L41/047 ; H03H9/54
摘要：
A bulk acoustic filter device includes: a substrate; a cavity forming layer disposed on the substrate so as to form a cavity; a lower electrode disposed on the cavity; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer; and a temperature compensation layer disposed below the lower electrode and in the cavity portion.
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