ACOUSTIC RESONATOR
    7.
    发明申请

    公开(公告)号:US20230022838A1

    公开(公告)日:2023-01-26

    申请号:US17579944

    申请日:2022-01-20

    Abstract: An acoustic resonator includes a substrate and a resonant portion. The resonant portion has a central portion in which a first electrode, a first piezoelectric layer, a second piezoelectric layer, and a second electrode are stacked in order on the substrate, and an extension portion extending outwardly from the central portion and including an insertion layer. A ratio of an average thickness of the first piezoelectric layer to an average thickness of the second piezoelectric layer is 18.4% to 40%.

    BULK-ACOUSTIC WAVE RESONATOR
    8.
    发明申请

    公开(公告)号:US20210075398A1

    公开(公告)日:2021-03-11

    申请号:US16875019

    申请日:2020-05-15

    Abstract: A bulk-acoustic wave resonator includes: a resonator comprising a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and an insertion layer disposed below the piezoelectric layer in the extension portion to raise the piezoelectric layer. The insertion layer may have a first inclined surface formed along a side surface facing the central portion, and the first electrode may have a second inclined surface extending from a lower end of the first inclined surface of the insertion layer.

    BULK ACOUSTIC WAVE RESONATOR
    9.
    发明申请

    公开(公告)号:US20180337650A1

    公开(公告)日:2018-11-22

    申请号:US15815966

    申请日:2017-11-17

    Abstract: A bulk acoustic wave resonator includes a substrate, a lower electrode connection member, a lower electrode, a piezoelectric layer, an upper electrode, an upper electrode connection member, and a dielectric layer in which the lower electrode, the piezoelectric layer, and the upper electrode are embedded. The lower electrode, the piezoelectric layer, and the upper electrode constitute a resonant portion. An extension portion extends away from either the lower electrode or the upper electrode to protrude outwardly from the resonant portion. A capacitor portion is constituted by the extension portion, a portion of the upper electrode connection member disposed above the extension portion, and a portion of the dielectric layer disposed between the extension portion and the portion of the upper electrode connection member disposed above the extension portion.

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