Invention Application
- Patent Title: METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
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Application No.: US15807661Application Date: 2017-11-09
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Publication No.: US20180065847A1Publication Date: 2018-03-08
- Inventor: Stephen E. LUCE , Anthony K. STAMPER
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01H59/00 ; H01H11/00 ; H01H49/00 ; H01H1/58

Abstract:
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first electrode, forming a second cantilevered electrode over a second electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to at least one of the first electrode and a second electrode, and the first cantilevered electrode includes an arm with an extending protrusion which extends upward from an upper surface of the arm.
Information query