Invention Application
- Patent Title: FAN-OUT PANEL LEVEL PACKAGE AND METHOD OF FABRICATING THE SAME
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Application No.: US15832938Application Date: 2017-12-06
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Publication No.: US20180096903A1Publication Date: 2018-04-05
- Inventor: Younghoon Sohn , Jinsung Kim , Yusin Yang , Chungsam Jun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2016-0050998 20160426
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00 ; H01L21/027 ; H01L21/311 ; H01L21/768 ; H01L21/56 ; H01L21/67 ; H01L21/683 ; H01L21/48 ; H01L21/02

Abstract:
A method of fabricating a package includes providing a mold substrate supporting dies in cavities of a fan-out substrate, detecting positions of the dies with respect to the fan-out substrate, and forming interconnection lines. At least one of the interconnection lines includes a first portion extending from the fan-out substrate to a target position on the cavity disposed between the fan-out substrate and one of the dies the one of the dies disposed at a detected position different from the target position, and a second portion extending from the one die to the fan-out substrate.
Information query
IPC分类: