OXIDE THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND DISPLAY PANEL AND DISPLAY DEVICE INCLUDING THE OXIDE THIN FILM TRANSISTOR
Abstract:
Disclosed are an oxide thin film transistor (TFT), a method of manufacturing the same, a display panel including the oxide TFT, and a display device including the display panel, in which a crystalline oxide semiconductor is provided on a metal insulation layer including metal through a metal organic chemical vapor deposition (MOCVD) process. The oxide TFT includes a metal insulation layer including metal, a crystalline oxide semiconductor adjacent to the metal insulation layer, a gate including metal, a gate insulation layer between the crystalline oxide semiconductor and the gate, a first conductor in one end of the crystalline oxide semiconductor, and a second conductor in another end of the crystalline oxide semiconductor.
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