Invention Application
- Patent Title: ULTRASONIC TRANSDUCER ELECTRODE ASSEMBLY
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Application No.: US15965385Application Date: 2018-04-27
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Publication No.: US20180242949A1Publication Date: 2018-08-30
- Inventor: Cheryl Rice , Dongjuan Chris Xi
- Applicant: VOLCANO CORPORATION
- Main IPC: A61B8/00
- IPC: A61B8/00 ; B06B1/06 ; H01L41/047 ; H01L41/08 ; H01L41/09 ; H01L41/29 ; H01L41/31

Abstract:
The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
Public/Granted literature
- US10357225B2 Ultrasonic transducer electrode assembly Public/Granted day:2019-07-23
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