- 专利标题: POSITION DETECTING SYSTEM AND PROCESSING APPARATUS
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申请号: US15949205申请日: 2018-04-10
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公开(公告)号: US20180301322A1公开(公告)日: 2018-10-18
- 发明人: Kippei SUGITA , Kenji NAGAI , Hidetoshi KIMURA
- 申请人: TOKYO ELECTRON LIMITED
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2017-079077 20170412
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/67 ; G01B11/27
摘要:
A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.
公开/授权文献
- US10199251B2 Position detecting system and processing apparatus 公开/授权日:2019-02-05
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