- 专利标题: METHODS OF FORMING EPI SEMICONDUCTOR MATERIAL ON A THINNED FIN IN THE SOURCE/DRAIN REGIONS OF A FINFET DEVICE
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申请号: US15585865申请日: 2017-05-03
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公开(公告)号: US20180323269A1公开(公告)日: 2018-11-08
- 发明人: Yi Qi , Jianwei Peng , Hsien-Ching Lo , Kwan-Yong Lim , Hui Zhan
- 申请人: GLOBALFOUNDRIES Inc.
- 主分类号: H01L29/417
- IPC分类号: H01L29/417 ; H01L29/78 ; H01L29/66
摘要:
One illustrative method disclosed includes, among other things, forming a gate around an initial fin structure and above a layer of insulating material, and performing a fin trimming process on an exposed portion of the initial fin structure in the source/drain region so as to produce a reduced-size fin portion positioned above a surface of a layer of insulating material in the source/drain region of the device, wherein the the reduced-size fin portion has a second size that is less than the first size. In this example, the method also includes forming a conformal epi semiconductor material on the reduced-size fin portion and forming a conductive source/drain contact structure that is conductively coupled to and wrapped around the conformal epi semiconductor material
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