Invention Application
- Patent Title: REPLACEMENT MATERIALS PROCESSES FOR FORMING CROSS POINT MEMORY
-
Application No.: US16045514Application Date: 2018-07-25
-
Publication No.: US20190013358A1Publication Date: 2019-01-10
- Inventor: Jong-Won Lee , Gianpaolo Spadini , Stephen W. Russell , Derchang Kau
- Applicant: MICRON TECHNOLOGY, INC.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; G11C13/00

Abstract:
Methods of forming memory cells comprising phase change and/or chalcogenide materials are disclosed. In one aspect, the method includes providing a lower line stack extending in a first direction, the lower line stack comprising a sacrificial line over a lower conductive line. The method further includes forming a chalcogenide line extending in the first direction by selectively removing the sacrificial material of the sacrificial line and replacing the sacrificial line with a chalcogenide material.
Public/Granted literature
- US10475853B2 Replacement materials processes for forming cross point memory Public/Granted day:2019-11-12
Information query
IPC分类: