Invention Application
- Patent Title: OPTICAL TEST SYSTEM AND METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE OPTICAL TEST SYSTEM AND METHOD
-
Application No.: US15940011Application Date: 2018-03-29
-
Publication No.: US20190113463A1Publication Date: 2019-04-18
- Inventor: Seongkeun CHO , Akinori OKUBO , Tae Hyun KIM , Sangwoo BAE , Janghwi LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2017-0132283 20171012
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/21 ; G01N21/95 ; H01L21/66 ; H01L21/67

Abstract:
An optical test system includes a stage region to accommodate an object to be tested, a first incident optical system which changes a first polarization state of a first light beam to a second polarization state and provide the first light beam in the second polarization state to the stage region in a first direction at a first incident angle which is not a right angle, a second incident optical system which changes a third polarization state of a second light beam to a fourth polarization state and inputs the second light beam in the fourth polarization state to the stage region in a second direction at a second incident angle which is not a right angle, and a main optical system to detect a first reflected light beam reflected from the stage region at a first reflection angle different from the first and second incident.
Public/Granted literature
Information query