Invention Application
- Patent Title: OPTICAL SENSOR
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Application No.: US16323810Application Date: 2017-11-09
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Publication No.: US20190172965A1Publication Date: 2019-06-06
- Inventor: Atsushi ISHIDA , Takashi BABA , Terumasa NAGANO , Noburo HOSOKAWA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2016-220777 20161111
- International Application: PCT/JP2017/040444 WO 20171109
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L27/144 ; H01L27/146 ; H01L31/0224

Abstract:
A photodetecting device includes a semiconductor substrate including a first principal surface and a second principal surface that oppose each other and a plurality of through-electrodes penetrating through the semiconductor substrate in a thickness direction. The semiconductor substrate includes a plurality of avalanche photodiodes arranged to operate in Geiger mode. The plurality of through-electrodes are electrically connected to the corresponding avalanche photodiodes. The semiconductor substrate includes a first area in which the plurality of avalanche photodiodes are distributed in at least a first direction and a second area in which the plurality of through-electrodes are distributed two-dimensionally. The first area and the second area are distributed in a second direction orthogonal to a first direction when viewed from a direction orthogonal to the first principal surface.
Public/Granted literature
- US10937920B2 Optical sensor Public/Granted day:2021-03-02
Information query
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