Invention Application
- Patent Title: ELECTROLYTIC PROCESSING JIG AND ELECTROLYTIC PROCESSING METHOD
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Application No.: US16330812Application Date: 2017-09-11
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Publication No.: US20190218682A1Publication Date: 2019-07-18
- Inventor: Tomohisa Hoshino , Masato Hamada
- Applicant: Tokyo Electron Limited
- Priority: JP2016-198729 20161007
- International Application: PCT/JP2017/032675 WO 20170911
- Main IPC: C25D17/12
- IPC: C25D17/12 ; C25D17/00 ; H01L21/288 ; H01L21/66

Abstract:
An electrolytic processing jig configured to perform an electrolytic processing on a processing target substrate includes a base body having a flat plate shape; an electrode provided at the base body; three or more terminals provided at the base body, each having elasticity and configured to be brought into contact with a peripheral portion of the processing target substrate; and a detecting unit configured to electrically detect a contact of at least one of the terminals with the processing target substrate.
Public/Granted literature
- US11542627B2 Electrolytic processing jig and electrolytic processing method Public/Granted day:2023-01-03
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