- 专利标题: PLATING APPARATUS, PLATING METHOD, AND SUBSTRATE HOLDER
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申请号: US16396384申请日: 2019-04-26
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公开(公告)号: US20190249326A1公开(公告)日: 2019-08-15
- 发明人: Junko MINE , Tsutomu NAKADA , Mitsutoshi YAHAGI
- 申请人: EBARA CORPORATION
- 优先权: JP2015-168969 20150828
- 主分类号: C25D17/06
- IPC分类号: C25D17/06 ; H01L23/00 ; H01L21/687 ; C25D17/00 ; C25D21/12 ; C25D5/18
摘要:
In-plane uniformity of a film that is plated on a polygonal substrate is enhanced. An anode holder configured to hold an anode, a substrate holder configured to hold a polygonal substrate, a plating bath for accommodating the anode holder and the substrate holder, and dipping the anode and the substrate in a plating solution, and a control device for controlling a current that flows between the anode and the substrate are included. The substrate holder has a plurality of power feeding members that are disposed along respective sides of the polygonal substrate. The control device is configured to be able to control the current so that currents of at least two different values are simultaneously supplied to the plurality of power feeding members.
公开/授权文献
- US10513795B2 Plating apparatus, plating method, and substrate holder 公开/授权日:2019-12-24
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