- 专利标题: CLEANING COMPONENTS AND METHODS IN A PLATING SYSTEM
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申请号: US16386646申请日: 2019-04-17
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公开(公告)号: US20190321861A1公开(公告)日: 2019-10-24
- 发明人: Joseph A. Jonathan , Kyle M. Hanson , Jason Rye , James Brown , Greg Wilson , Eric J. Bergman , Tricia A. Youngbull , Timothy Gale Stolt
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B08B1/00
- IPC分类号: B08B1/00 ; C25D17/00
摘要:
Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.
公开/授权文献
- US11241718B2 Cleaning components and methods in a plating system 公开/授权日:2022-02-08
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