公开(公告)号：US20170263472A1

公开(公告)日：2017-09-14

申请号：US15441081

申请日：2017-02-23

Applicant: APPLIED Materials, Inc.

Inventor： John L. Klocke ,  Kyle M. Hanson ,  Joseph A. Jonathan ,  Stuart Crane

IPC: H01L21/67 ,  B08B3/02 ,  B08B3/08 ,  B08B3/04 ,  H01L21/687 ,  B08B3/12

CPC classification number: H01L21/67057 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/6719 ,  H01L21/68707 ,  H01L21/68764 ,  H01L21/68771 ,  H01L21/68785 ,  H01L21/68792

Abstract: A wafer processor has a rotor holding wafers within a process tank. The rotor rotates sequentially moving the wafers through a process liquid held in the process tank. The tank may have an I-beam shape to reduce the volume of process liquid. A load port is provided at a top of the process tank for loading and unloading wafers into and out of the process tank. Rinsing and cleaning chambers may be associated with the load port to remove process liquid from processed wafers. The processor may be oriented with the rotor rotating about a horizontal axis or about a vertical axis.

公开(公告)号：US20190321861A1

公开(公告)日：2019-10-24

申请号：US16386646

申请日：2019-04-17

Applicant: Applied Materials, Inc.

Inventor： Joseph A. Jonathan ,  Kyle M. Hanson ,  Jason Rye ,  James Brown ,  Greg Wilson ,  Eric J. Bergman ,  Tricia A. Youngbull ,  Timothy Gale Stolt

IPC: B08B1/00 ,  C25D17/00

Abstract: Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.