- 专利标题: SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
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申请号: US16475146申请日: 2017-11-10
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公开(公告)号: US20190333755A1公开(公告)日: 2019-10-31
- 发明人: Yosuke HANAWA , Dai UEDA , Yuta SASAKI
- 申请人: SCREEN Holdings Co., Ltd.
- 优先权: JP2017-000867 20170106
- 国际申请: PCT/JP2017/040563 WO 20171110
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/67 ; B08B3/08 ; B08B7/00
摘要:
A substrate treating method and a substrate treating apparatus which can reduce the collapse of a pattern on a substrate. The substrate treating method includes a supply step of supplying a process liquid including a sublimable substance in a molten state to a pattern-formed surface of a substrate; a solidification step of solidifying the process liquid on the pattern-formed surface so as to form a solidified body; a sublimation step of subliming the solidified body so as to remove the solidified body from the pattern-formed surface; and an organic substance removal step of removing, when the solidified body is sublimed, an organic substance precipitated on a sublimation interface, and the organic substance removal step is performed so as to overlap at least part of the sublimation step.
公开/授权文献
- US11133175B2 Substrate treating method and substrate treating apparatus 公开/授权日:2021-09-28
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