发明申请
- 专利标题: Leveler Compositions for use in Copper Deposition in Manufacture of Microelectronics
-
申请号: US16672720申请日: 2019-11-04
-
公开(公告)号: US20200063280A1公开(公告)日: 2020-02-27
- 发明人: Vincent Paneccasio , Kyle Whitten , Thomas B. Richardson , Ivan Li
- 申请人: MacDermid Enthone Inc.
- 主分类号: C25D3/38
- IPC分类号: C25D3/38 ; C08G65/333 ; H05K3/18 ; H05K3/42 ; C25D7/12 ; C08G65/24 ; C08L71/03
摘要:
An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic composition. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate. The aqueous electrolytic composition comprises: (a) copper ions; (b) an acid; (c) a suppressor; and (d) a quaternized poly(epihalohydrin) comprising n repeating units corresponding to structure 1N and p repeating units corresponding to structure 1P:
公开/授权文献
信息查询