Invention Application
- Patent Title: CELL BOUNDARY STRUCTURE FOR EMBEDDED MEMORY
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Application No.: US16732402Application Date: 2020-01-02
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Publication No.: US20200144276A1Publication Date: 2020-05-07
- Inventor: Ming Chyi Liu , Shih-Chang Liu , Sheng-Chieh Chen , Yu-Hsing Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; H01L21/28 ; H01L27/11534 ; H01L27/11548 ; H01L21/762 ; H01L27/11526 ; H01L29/423

Abstract:
Various embodiments of the present application are directed to a method for forming an embedded memory boundary structure with a boundary sidewall spacer. In some embodiments, an isolation structure is formed in a semiconductor substrate to separate a memory region from a logic region. A multilayer film is formed covering the semiconductor substrate. A memory structure is formed on the memory region from the multilayer film. An etch is performed into the multilayer film to remove the multilayer film from the logic region, such that the multilayer film at least partially defines a dummy sidewall on the isolation structure. A spacer layer is formed covering the memory structure, the isolation structure, and the logic region, and further lining the dummy sidewall. An etch is performed into the spacer layer to form a spacer on dummy sidewall from the spacer layer. A logic device structure is formed on the logic region.
Public/Granted literature
- US10734394B2 Cell boundary structure for embedded memory Public/Granted day:2020-08-04
Information query
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