- 专利标题: ETCHING COMPOSITION, METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING A DISPLAY DEVICE USING THE SAME
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申请号: US16579073申请日: 2019-09-23
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公开(公告)号: US20200148951A1公开(公告)日: 2020-05-14
- 发明人: Jonghee PARK , Kitae KIM , Jinseock KIM , Gyu-Po KIM , Hyun-Cheol SHIN , Dae-Woo LEE , Sang-Hyuk LEE , Zheng HONG
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@14153176
- 主分类号: C09K13/06
- IPC分类号: C09K13/06
摘要:
An etching composition includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a sulfate compound and water.
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