Invention Application
- Patent Title: MULTI-LAYERED WINDOWS FOR USE IN CHEMICAL-MECHANICAL PLANARIZATION SYSTEMS
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Application No.: US16559472Application Date: 2019-09-03
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Publication No.: US20200164482A1Publication Date: 2020-05-28
- Inventor: Shih-Chung Chen , Yi-Shao Lin , Sheng-Tai Peng , Ya-Jen Sheuh , Hung-Lin Chen , Ren-Dou Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: B24B37/20
- IPC: B24B37/20 ; B24B37/013 ; C09G1/02 ; B24B37/04

Abstract:
Described herein are multi-layered windows for use in chemical-mechanical planarization (CMP) systems and CMP processes. The multi-layered windows of the present disclosure include a transparent structural layer and a hydrophilic surfactant applied to at least a portion of at least one surface of the transparent structural layer. Such multi-layered windows may be in the polishing pad, the platen, or both.
Public/Granted literature
- US12138735B2 Multi-layered windows for use in chemical-mechanical planarization systems Public/Granted day:2024-11-12
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