发明申请
- 专利标题: DUAL ADDITIVE COMPOSITION FOR POLISHING MEMORY HARD DISKS EXHIBITING EDGE ROLL OFF
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申请号: US16729905申请日: 2019-12-30
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公开(公告)号: US20200224057A1公开(公告)日: 2020-07-16
- 发明人: Tong LI
- 申请人: Cabot Microelectronics Corporation
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; H01L21/321
摘要:
The invention provides a chemical-mechanical polishing composition comprising (a) an abrasive comprising colloidal silica, (b) a compound of formula (I), (c) a compound of formula (II), (d) hydrogen peroxide, and (e) water, wherein the polishing composition has a pH of about 1 to about 5. The invention also provides a method of chemically-mechanically polishing a substrate, especially a nickel-phosphorous substrate, by contacting the substrate with the inventive chemical-mechanical polishing composition.
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