- 专利标题: CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMATION METHOD, AND PROGRAM RECORDING MEDIUM ON WHICH A PROGRAM FOR A CONCENTRATION CONTROL APPARATUS IS RECORDED
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申请号: US16807722申请日: 2020-03-03
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公开(公告)号: US20200294820A1公开(公告)日: 2020-09-17
- 发明人: Toru SHIMIZU , Masakazu MINAMI
- 申请人: HORIBA STEC, Co., Ltd.
- 申请人地址: JP Kyoto
- 专利权人: HORIBA STEC, Co., Ltd.
- 当前专利权人: HORIBA STEC, Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5a5c0eaf
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; G05D11/13 ; C23C16/448
摘要:
In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.
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