• 专利标题: CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMATION METHOD, AND PROGRAM RECORDING MEDIUM ON WHICH A PROGRAM FOR A CONCENTRATION CONTROL APPARATUS IS RECORDED
  • 申请号: US16807722
    申请日: 2020-03-03
  • 公开(公告)号: US20200294820A1
    公开(公告)日: 2020-09-17
  • 发明人: Toru SHIMIZUMasakazu MINAMI
  • 申请人: HORIBA STEC, Co., Ltd.
  • 申请人地址: JP Kyoto
  • 专利权人: HORIBA STEC, Co., Ltd.
  • 当前专利权人: HORIBA STEC, Co., Ltd.
  • 当前专利权人地址: JP Kyoto
  • 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5a5c0eaf
  • 主分类号: H01L21/67
  • IPC分类号: H01L21/67 G05D11/13 C23C16/448
CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMATION METHOD, AND PROGRAM RECORDING MEDIUM ON WHICH A PROGRAM FOR A CONCENTRATION CONTROL APPARATUS IS RECORDED
摘要:
In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.
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