公开(公告)号：US20220066481A1

公开(公告)日：2022-03-03

申请号：US17409041

申请日：2021-08-23

Applicant: HORIBA STEC, CO., LTD.

Inventor： Toru SHIMIZU

IPC: G05D11/13 ,  G05D7/06

Abstract: Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.

公开(公告)号：US20200240015A1

公开(公告)日：2020-07-30

申请号：US16749282

申请日：2020-01-22

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Toru SHIMIZU ,  Masakazu MINAMI

IPC: C23C16/455 ,  C23C16/448

Abstract: A concentration control apparatus capable of appropriately making a zero adjustment of a concentration measurement mechanism without interrupting a semiconductor manufacturing process includes: a control valve that controls gas flowing through a lead-out flow path; a concentration measurement mechanism that measures the concentration of source gas contained in gas flowing through the lead-out flow path; a concentration controller that controls the control valve so that the deviation between measured concentration measured by the concentration measurement mechanism and preset set concentration decreases; a judgement time point determination part that determines a judgement time point that is the time point when the gas present in a measurement part where the concentration measurement mechanism performs the concentration measurement has been replaced with other gas; and a zero adjustment part that makes a zero adjustment of the concentration measurement mechanism at or after the judgement time point.

公开(公告)号：US20200294820A1

公开(公告)日：2020-09-17

申请号：US16807722

申请日：2020-03-03

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Toru SHIMIZU ,  Masakazu MINAMI

IPC: H01L21/67 ,  G05D11/13 ,  C23C16/448

Abstract: In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.

公开(公告)号：US20240030013A1

公开(公告)日：2024-01-25

申请号：US18222029

申请日：2023-07-14

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Miyako HADA ,  Motonobu TAKAHASHI ,  Masakazu MINAMI ,  Yuhei SAKAGUCHI ,  Toru SHIMIZU ,  Tetsuo FUJII

IPC: H01J37/32 ,  H01L21/67

CPC classification number: H01J37/32981 ,  H01J37/32926 ,  H01L21/67069 ,  H01L21/67253 ,  H01J2237/2445 ,  H01J2237/3341

Abstract: The present invention is aimed to perform precise monitoring of the processed amount by which a workpiece is processed, and includes a measurement unit that measures a concentration or a partial pressure of a reaction product generated while the workpiece is being processed, and an operation unit that calculates the processed amount of the workpiece using an output value of the measurement unit. The measurement unit includes: a laser light source that irradiates target gas containing the reaction product with a laser beam; a photodetector that detects a laser beam having passed through the target gas; and a signal processing unit that calculates the concentration or the partial pressure of the reaction product based on a detection signal of the photodetector. The operation unit includes a time integration unit; a relationship data storage unit; and a processed amount calculation unit.

公开(公告)号：US20220099561A1

公开(公告)日：2022-03-31

申请号：US17447605

申请日：2021-09-14

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Toru SHIMIZU ,  Takeshi AKAMATSU

IPC: G01N21/05 ,  G01N21/3504

Abstract: The present invention reduces thermal stress that is generated in a join portion of a window material in an optical measurement cell, and is an optical measurement cell having translucent windows through which light is transmitted and into an interior of which is introduced a test sample. This optical measurement cell has a planar window material that forms the translucent windows, a join supporting portion that is joined to an outer edge portion of a main surface of the window material and supports the window material, and a low thermal expansion component that is provided on an outer-side circumferential surface of the join supporting portion and whose coefficient of thermal expansion is lower than a coefficient of thermal expansion of the join supporting portion.

公开(公告)号：US20200340918A1

公开(公告)日：2020-10-29

申请号：US16849381

申请日：2020-04-15

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Toru SHIMIZU ,  Yuhei SAKAGUCHI ,  Masakazu MINAMI

IPC: G01N21/61

Abstract: In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure—absorbance relation storing part that stores a partial pressure—absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.

公开(公告)号：US20190177850A1

公开(公告)日：2019-06-13

申请号：US16217778

申请日：2018-12-12

Applicant: HORIBA STEC, CO., LTD.

Inventor： Toru SHIMIZU

IPC: C23C16/52 ,  H01L21/67

Abstract: In a concentration controller that intermittently leads out material gas from a vaporization tank, in order to control the flow rates of carrier and diluent gases so that the concentration of the material gas can be suppressed from overshooting immediately after the start of material gas supply period, the concentration controller is adapted to include: a concentration calculation part that calculates the concentration of the material gas on the basis of an output signal from a concentration monitor; and a set flow rate calculation part that, on the basis of actual concentration calculated by the concentration calculation part, an actual flow rate outputted from a flow rate control device or the set flow rate of the flow rate control device, and a preset target concentration, calculates the initial set flow rate of the flow rate control device.

公开(公告)号：US20190085444A1

公开(公告)日：2019-03-21

申请号：US16134082

申请日：2018-09-18

Applicant: HORIBA STEC, CO., LTD.

Inventor： Toru SHIMIZU ,  Masakazu MINAMI

IPC: C23C14/54

Abstract: Provided is a concentration control apparatus that, without reducing maintainability, can shorten piping to improve responsiveness. The concentration control apparatus is one adapted to introduce carrier gas into a storage tank storing a material, and control the concentration of material gas that is led out of the storage tank as mixed gas with the carrier gas and results from vaporization of the material. Also, the concentration control apparatus includes: a first unit that controls the flow rate of the carrier gas to be introduced into the storage tank; and a second unit that detects the concentration of the material gas led out of the storage tank.

公开(公告)号：US20230228679A1

公开(公告)日：2023-07-20

申请号：US18087006

申请日：2022-12-22

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Yoshiaki NAKATA ,  Masakazu MINAMI ,  Yuhei SAKAGUCHI ,  Toru SHIMIZU ,  Takeshi AKAMATSU

IPC: G01N21/61 ,  G01N33/00

CPC classification number: G01N21/61 ,  G01N33/0027 ,  G01N33/007

Abstract: In order to prevent cracking of a window material in manufacturing an optical measurement cell that satisfies various performances required for airtightness, heat resistance, and the like by atomic diffusion bonding, an optical measurement cell into which a sample is introduced includes a light transmission window through which light is transmitted, and includes a window material forming the light transmission window, and a flange member to which the window material is bonded via a metal thin film, and a ratio of a thermal expansion coefficient of the flange member to a thermal expansion coefficient of the window material is 0.5 times or more and 1.5 times or less.

公开(公告)号：US20220307977A1

公开(公告)日：2022-09-29

申请号：US17695167

申请日：2022-03-15

Applicant: Tokyo Electron Limited ,  HORIBA STEC, Co., Ltd.

Inventor： Yuichi FURUYA ,  Masayuki TANAKA ,  Yuhei SAKAGUCHI ,  Masakazu MINAMI ,  Toru SHIMIZU

IPC: G01N21/3518

Abstract: In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filter 31 that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filter 32 that is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculator 4 that is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter 31 and a second absorbance measured by the light transmitted through the CO filter 32.