Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
-
Application No.: US16558822Application Date: 2019-09-03
-
Publication No.: US20200295087A1Publication Date: 2020-09-17
- Inventor: Atsushi KAWASUMI , Tsuneo INABA
- Applicant: TOSHIBA MEMORY CORPORATION
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@33f0db61
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A semiconductor memory device includes a first wiring extending in a first direction, a second wiring above the first wiring and extending in a second direction, first and second memory cells electrically connected in parallel between the first and second wirings and each including a phase change material, a first insulating film on a side portion of the first cell facing the second cell in the second direction, a third wiring above the second wiring and extending in the second direction, a fourth wiring above the third wiring and extending in the first direction, third and fourth memory cells electrically connected between the third and fourth wirings in parallel and each including a phase change material, and a second insulating film on a side of the third cell facing the fourth cell in the second direction. The first film has a higher thermal insulation capacity than the second film.
Public/Granted literature
- US11201191B2 Semiconductor memory device having a plurality of memory cells each having a phase change material Public/Granted day:2021-12-14
Information query
IPC分类: