- 专利标题： Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films
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申请号： US17036193申请日： 2020-09-29
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公开(公告)号： US20210017339A1公开(公告)日： 2021-01-21
- 发明人: Manchao Xiao , Matthew R. MacDonald , Xinjian Lei , Meiliang Wang
- 申请人： Versum Materials US, LLC
- 申请人地址： US AZ Tempe
- 专利权人： Versum Materials US, LLC
- 当前专利权人： Versum Materials US, LLC
- 当前专利权人地址： US AZ Tempe
- 主分类号： C08G77/26
- IPC分类号： C08G77/26 ; C23C16/455 ; C08G77/06 ; C07F7/18 ; C23C16/40 ; C07F7/10 ; C07F7/21 ; C08L83/08 ; C08G77/04
摘要：
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.
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