- 专利标题: Magnetic Sensor Array With One TMR Stack Having Two Free Layers
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申请号: US16730746申请日: 2019-12-30
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公开(公告)号: US20210055361A1公开(公告)日: 2021-02-25
- 发明人: Yuankai ZHENG , Christian KAISER , Zhitao DIAO , Chih-Ching HU , Chen-jung CHIEN , Yung-Hung WANG , Ming MAO , Ming JIANG
- 申请人: Western Digital Technologies, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Western Digital Technologies, Inc.
- 当前专利权人: Western Digital Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; H01L43/08 ; G01R17/10
摘要:
The present disclosure generally relates to a Wheatstone bridge array comprising TMR sensors and a method of fabrication thereof. In the Wheatstone bridge array, there are four distinct TMR sensors. The TMR sensors are all fabricated simultaneously to create four identical TMR sensors that have synthetic antiferromagnetic free layers as the top layer. The synthetic antiferromagnetic free layers comprise a first magnetic layer, a spacer layer, and a second magnetic layer. After forming the four identical TMR sensors, the spacer layer and the second magnetic layer are removed from two TMR sensors. Following the removal of the spacer layer and the second magnetic layer, a new magnetic layer is formed on the now exposed first magnetic layer such that the new magnetic layer has substantially the same thickness as the spacer layer and second magnetic layer combined.
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