发明申请
- 专利标题: NANO-WIRE GROWTH
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申请号: US17115238申请日: 2020-12-08
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公开(公告)号: US20210087708A1公开(公告)日: 2021-03-25
- 发明人: Min YUAN
- 申请人: SILCOTEK CORP.
- 申请人地址: US PA Bellefonte
- 专利权人: SILCOTEK CORP.
- 当前专利权人: SILCOTEK CORP.
- 当前专利权人地址: US PA Bellefonte
- 主分类号: C30B29/62
- IPC分类号: C30B29/62 ; C30B25/18 ; C30B29/12 ; C30B33/00 ; C01B33/04
摘要:
Nano-wire growth processes, nano-wires, and articles having nano-wires are disclosed. The nano-wire growth process includes trapping growth-inducing particles on a substrate, positioning the substrate within a chamber, closing the chamber, applying a vacuum to the chamber, introducing a precursor gas to the chamber, and thermally decomposing the precursor gas. The thermally decomposing of the precursor gas grows nano-wires from the growth-inducing particles. The nano-wires and the articles having the nano-wires are produced by the nano-wire growth process.
公开/授权文献
- US11618970B2 Nano-wire growth 公开/授权日:2023-04-04
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