Invention Application
- Patent Title: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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Application No.: US16986367Application Date: 2020-08-06
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Publication No.: US20210125989A1Publication Date: 2021-04-29
- Inventor: Joongchan SHIN , Changkyu KIM , Hui-Jung KIM , Iljae SHIN , Taehyun AN , Kiseok LEE , Eunju CHO , Hyungeun CHOI , Sung-Min PARK , Ahram LEE , Sangyeon HAN , Yoosang HWANG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2019-0135889 20191029
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L23/528

Abstract:
A three-dimensional semiconductor memory device includes first semiconductor patterns, which are vertically spaced apart from each other on a substrate, each of which includes first and second end portions spaced apart from each other, and first and second side surfaces spaced apart from each other to connect the first and second end portions, first and second source/drain regions disposed in each of the first semiconductor patterns and adjacent to the first and second end portions, respectively, a channel region in each of the first semiconductor patterns and between the first and second source/drain regions, a first word line adjacent to the first side surfaces and the channel regions and vertically extended, and a gate insulating layer interposed between the first word line and the first side surfaces. The gate insulating layer may be extended to be interposed between the first source/drain regions.
Public/Granted literature
- US11502084B2 Three-dimensional semiconductor memory device Public/Granted day:2022-11-15
Information query
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