Invention Application
- Patent Title: VERTICAL-CAVITY SURFACE-EMITTING LASER (VCSEL) DEVICE AND METHOD OF MAKING THE SAME
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Application No.: US16828764Application Date: 2020-03-24
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Publication No.: US20210305783A1Publication Date: 2021-09-30
- Inventor: Itshak Kalifa , Elad Mentovich , Vladimir Iakovlev , Yuri Berk , Tamir Sharkaz
- Applicant: Mellanox Technologies, Ltd.
- Applicant Address: IL Yokneam
- Assignee: Mellanox Technologies, Ltd.
- Current Assignee: Mellanox Technologies, Ltd.
- Current Assignee Address: IL Yokneam
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/343

Abstract:
A VCSEL includes an active region between a top distributed Bragg reflector (DBR) and a bottom DBR each having alternating GaAs and AlGaAs layers. The active region includes quantum wells (QW) confined between top and bottom GaAs-containing current-spreading layers (CSL), an aperture layer having an optical aperture and a tunnel junction layer above the QW. A GaAs intermediate layer configured to have an open top air gap is disposed over a boundary layer of the active region and the top DBR. The air gap is made wider than the optical aperture and has a height equal to one quarter of VCSEL's emission wavelength in air. The top DBR is attached to the intermediate layer by applying wafer bonding techniques. VCSEL output, the air gap, and the optical aperture are aligned on the same optical axis. The bottom DBR is epitaxially grown on a silicon or a GaAs substrate.
Public/Granted literature
- US11721952B2 Vertical-cavity surface-emitting laser (VCSEL) device and method of making the same Public/Granted day:2023-08-08
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