- 专利标题: HIGH LINEARITY HEMT DEVICE AND PREPARATION METHOD THEREOF
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申请号: US17355644申请日: 2021-06-23
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公开(公告)号: US20210359121A1公开(公告)日: 2021-11-18
- 发明人: Xuefeng Zheng , Xiaohua Ma , Zhenling Tang , Peijun Ma , Ming Du , Minhan Mi , Yunlong He , Yang Lu , Xiaohu Wang , Chong Wang , Yue Hao
- 申请人: Xidian University
- 申请人地址: CN Xi'an
- 专利权人: Xidian University
- 当前专利权人: Xidian University
- 当前专利权人地址: CN Xi'an
- 优先权: CN202010402529.1 20200513,CN202010402538.0 20200513,CN202010403434.1 20200513
- 主分类号: H01L29/778
- IPC分类号: H01L29/778 ; H01L29/20
摘要:
A high electron mobility transistor (HEMT) device is provided. The HEMT device includes a substrate layer, a buffer layer, a barrier layer, and a metallic electrode layer sequentially arranged in that order from bottom to top. The metallic electrode layer includes a source electrode, a gate electrode and a drain electrode sequentially arranged in that order from left to right. The barrier layer may include m number of fluorine-doped regions arranged in sequence, where m is a positive integer and m≥2. The HEMT device can realize a relative stability of transconductance in a large range of a gate-source-bias through mutual compensation of transconductances in the fluorine-doped regions with different fluorine-ion concentrations of the barrier layer under the gate electrode, and the HEMT device has a good linearity without the need of excessive adjustments of material structure and device.
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