- 专利标题: CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM
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申请号: US17344617申请日: 2021-06-10
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公开(公告)号: US20210402565A1公开(公告)日: 2021-12-30
- 发明人: Roy C. Nangoy , Shantanu Rajiv Gadgil , Nathan Arron Davis , Allen L. D`Ambra , Michael J. Coughlin , Sumit Subhash Patankar
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B24B57/02
- IPC分类号: B24B57/02 ; B24B53/017 ; B24B37/34
摘要:
A polishing assembly includes a rotatable platen to support a polishing pad, a polishing liquid delivery arm having an enclosure open at a bottom thereof and one or more ports to deliver a polishing liquid and a cleaning fluid downwardly through an interior space of the enclosure onto the polishing pad, and a delivery arm cleaning tool removably attached to the polishing liquid delivery arm, the cleaning tool extending below the delivery arm and having a delivery arm-facing surface shaped such that the cleaning tool directs the cleaning fluid from the polishing liquid delivery arm on to a surface of the enclosure of the polishing liquid delivery arm.
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