Invention Application
- Patent Title: OUTPUT SIGNAL PROCESSING APPARATUS FOR EDDY CURRENT SENSOR
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Application No.: US17410099Application Date: 2021-08-24
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Publication No.: US20220063056A1Publication Date: 2022-03-03
- Inventor: Atsushi ABE , Taro TAKAHASHI , Hiroaki SHIBUE , Shinpei TOKUNAGA , Katsuhide WATANABE
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2020-141608 20200825
- Main IPC: B24B49/10
- IPC: B24B49/10 ; G01B7/06

Abstract:
An eddy current sensor has an exciting coil and a detection coil. A holding circuit holds reference data indicating a characteristic of an output signal output from the detection coil at a reference state and outputs the reference data at a state other than the reference state. A pseudo signal generating circuit generates and outputs a balance coil pseudo signal corresponding to the output signal output from the detection coil at the reference state from the reference data output from the holding circuit. A bridge circuit, at the state other than the reference state, receives the output signal output from the detection coil and the balance coil pseudo signal and outputs a bridge output signal corresponding to a difference between the output signal and the balance coil pseudo signal as a bridge output signal.
Public/Granted literature
- US12179310B2 Output signal processing apparatus for eddy current sensor Public/Granted day:2024-12-31
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