Invention Application
- Patent Title: ONIUM SALT-CONTAINING TREATMENT LIQUID FOR SEMICONDUCTOR WAFERS
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Application No.: US17419058Application Date: 2020-02-13
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Publication No.: US20220073820A1Publication Date: 2022-03-10
- Inventor: Yuki KIKKAWA , Tomoaki SATO , Takafumi SHIMODA , Takayuki NEGISHI
- Applicant: TOKUYAMA CORPORATION
- Applicant Address: JP Yamaguchi
- Assignee: TOKUYAMA CORPORATION
- Current Assignee: TOKUYAMA CORPORATION
- Current Assignee Address: JP Yamaguchi
- Priority: JP2019-024016 20190213,JP2019-045761 20190313,JP2019-093194 20190516,JP2019-110984 20190614
- International Application: PCT/JP2020/005663 WO 20200213
- Main IPC: C09K13/06
- IPC: C09K13/06 ; H01L21/304

Abstract:
Provided is a treatment liquid for a semiconductor wafer or the like used in a process for forming a semiconductor. Namely a treatment liquid containing (A) a hypochlorite ion, and (B) an alkylammonium salt expressed by the following Formula (1), or the like is provided. (In the Formula, “a” is an integer from 6 to 20; R1, R2, and R3 are independently, for example, an alkyl group with a carbon number from 1 to 20; and X− is, for example, a chloride ion.)
Public/Granted literature
- US12024663B2 Onium salt-containing treatment liquid for semiconductor wafers Public/Granted day:2024-07-02
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