Invention Application
- Patent Title: PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT
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Application No.: US17446898Application Date: 2021-09-03
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Publication No.: US20220081285A1Publication Date: 2022-03-17
- Inventor: Heribert Weber , Peter Schmollngruber , Thomas Friedrich , Andreas Scheurle , Joachim Fritz , Sophielouise Mach
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Priority: DE102020211554.0 20200915
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00

Abstract:
A production method for a micromechanical component for a sensor or microphone device. The method includes: patterning a plurality of first trenches through a substrate surface of a monocrystalline substrate made of at least one semiconductor material using anisotropic etching, covering the lateral walls of the plurality of first trenches with a passivation layer, while bottom areas of the plurality of first trenches are kept free or are freed of the passivation layer, etching at least one first cavity, into which the plurality of first trenches opens, into the monocrystalline substrate using an isotropic etching method, in which an etching medium of the isotropic etching method is conducted through the plurality of first trenches, and by covering the plurality of first trenches by epitaxially growing a monocrystalline sealing layer on the substrate surface of the monocrystalline substrate made of the at least one identical semiconductor material as the monocrystalline substrate.
Public/Granted literature
- US11905166B2 Production method for a micromechanical component Public/Granted day:2024-02-20
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